BS ISO BRITISH STANDARD 29081:2010 Surface chemical analysis Auger electron spectroscopy - Reporting of methods used for charge control and charge correction ICS 71.040.40 BSi NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAW British Standards BS ISO29081:2010 National foreword This British Standard is theUK implementation of ISO29081:2010. The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis. Alist of organizations represented on this committee can be obtained on request to its secretary. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard cannot confer immunity from legal obligations. This British Standard Amendments/corrigendaissuedsincepublication was published under the authority ofthe Standards Policy and Strategy Date Comments Committee on 28 February 2010 BSI 2010 ISBN 978 0 580 63478 9 BS ISO 29081:2010 ISO INTERNATIONAL STANDARD 29081 First edition 2010-02-15 Surface chemical analysis Auger electron spectroscopy - Reporting of methods used for charge control and charge correction Analysechimiquedessurfaces-Spectroscopiedesélectrons Auger-Indication desmethodes mises enceuvrepourlecontroleetla correction de la charge Reference number ISO 29081:2010(E) @ ISO 2010 BS ISO 29081:2010 ISO29081:2010(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below. COPYRIGHTPROTECTEDDOCUMENT ISO 2010 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either so at the address below or ISO copyright office Case postale 56.CH-1211Geneva 20 Tel. + 41 22 749 0111 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland ii @ ISO 2010 All rights reserved BSISO29081:2010 ISO29081:2010(E) Contents Page Foreword. iv Introduction. 1 Scope 2 Normative references... 3 Terms and definitions. 4 Symbols and abbreviated terms... 5 Apparatus.... 5.1 Charge-control technique... 5.2 5.3 Specimenmountingandpreparation.. 5.4 Instrument calibration... 6 Reporting of information related to charge control... 6.1 Methods of charge control.... 6.2 Reasonsforneedingcharge controland choice ofmethod, 6.3 Specimen information... 6.3.1 Specimen form... 6.3.2 Specimen dimensions.. 6.3.3 Specimen-mounting methods..... 6.3.4 Specimen treatment prior to or during analysis ... 6.4 Values ofexperimental parameters.. 6.5 Informationontheeffectiveness ofmethodsof chargecontrol.... 7 Reporting of method(s) used for charge correctionand thevalue of that correction... 7.1 Methods of charge correction... 7.2 Approach........... 7.3 Value of correction energy... AnnexA(informative)Description of methods ofcharge control forAugerelectron spectroscopy... A.1 Introduction.... A.2 Hierarchical table of methods for reducing charging... A.3 Methods for minimizing charging during AES.... A.3.1 Introduction... A.3.2 Decreasing specimen resistivity..... A.3.3 Decreasing the insulatorthickness (or effective insulator thickness). A.3.4 Reducing the current density, limiting primary-electron dose and using additional current sources... A.3.5 Optimizing the total secondary-electron emission yield....... .12 A.4 Considerations forhighly non-uniform specimens,fibres and particles and the use of sputter depth profiling .... .14 A.4.1 Introduction... .14 A